Microelectronic industry drives the state of the art clean room design, and this industry accounts for a significant number of all operating clean rooms. Cleanrooms for microelectronic or nanotechnology are intended to keep the temperature, humidity, particulate, static, and pressure at certain acceptable levels. These are the elements that directly affect the final product.
The cleanliness level of the cleanroom environment must be maintained on a constant basis because defects in the process can occur at any stage. Most of the time an error is not discovered until the end of the many steps to produce a final product. It can also be very costly if the cleanroom does not operate properly.
The classification range for microelectronic or nanotech is from ISO Class 1 to ISO Class 6 with various processes happening at different levels of cleanliness.
Cleanroom design and build for microelectronics manufacturing we include (not limited to) are:
• Airflow design and facility: Installation of fan filter units to ensure outside air entering a cleanroom are filtered to exclude dust. Inside air will constantly be circulated through HEPA or ULPA filters to remove internally generated contaminants.
• HVAC Systems: To control the humidity at low levels. Some will require ionizer to prevent electrostatic discharge problems.
• Airlocks and cleanroom suit facilities: An explicitly controlled space for personnel to suit up with ‘bunny’ suits to prepared for access to clean rooms. Some high-level cleanrooms will require air shower to remove contaminants.